TEEIA

精密潔淨奈米級光罩儲存櫃

博士門股份有限公司

Bossmen Inc 成立於 1993 年,自推出獲得專利的電子濕度控制櫃以來,一直是濕度和濕度控制設備的行業領導者。

Solution Details

杜絕粉塵近入傳送盒內側縫隙

傳送盒內側的過濾器必須有足夠的透氣性,以導入足夠的氣流,但同時也得具備足以承受清潔程序的耐用度。


  1. 本機器內含氮氣純化器。
  2. 數位流量計、調壓閥可以調整每一個進入獨立光罩盒的氮氣流速並進行可視化監控。


適用EUV POD/ RSP 200

和傳統的光罩保存櫃比較,本保存設備突破性的優點有三:


  1. 確實隔離汙染物,確認潔淨氮氣有效的填充到每一個獨立的光罩盒內,除進行光罩乾式清洗,也穩定提供每一個光罩7%-20%相對溼度,合乎光罩保存規範的濕度環境。
  2. 利用RFID及光感應技術監控每一光罩保存盒進出,進行有效的物料及人員管理。
  3. 比較傳統的氮氣櫃,可以節省90%以上的氮氣流量。


結合5大系統滿足光罩盒的潔淨、節能與管理目的

本創新設備品質五大優勢:供氧系統、過濾系統、監控系統、警示系統及安全模式,皆完全符合儲存及管理潛在需求及並且提高儲存的可靠度。

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