TEEIA 台灣電子製造設備工業同業公會

PLP多功能複合式加熱設備　PLP Multi-Function Hybrid Heating Equipment

銓行應用材料股份有限公司

銓行應材專注於半導體與高階製造設備之關鍵模組與客製化改造服務，整合多溫控區、紅外線、熱風與水冷系統，提升製程穩定性、溫度均勻性與生產效率，成為客戶可信賴的工程技術夥伴。

Alltek specialize in key equipment modules and customized retrofit solutions for the semiconductor and advanced manufacturing industries. By integrating multi-zone temperature control, infrared, hot air, and water-cooling systems, we enhance process stability, thermal uniformity, and manufacturing efficiency, serving as a reliable engineering partner for long-term equipment optimization.

方案內容

PLP多功能複合式加熱設備 PLP Multi-Function Hybrid Heating Equipment

加熱設備以Chamber為單位的模組化設計，依客製需求數量配搭，精準加熱，最高溫可達350℃。

結合熱傳導和紅外線加熱，實現基板均勻加熱，提高產品品質。

Featuring a modular, chamber-based design, the heating system can be flexibly configured to meet diverse customer requirements. With precise temperature control up to 350 °C, it delivers reliable and efficient thermal performance.

By integrating conductive and infrared heating technologies, the system ensures uniform substrate heating, improving process consistency and overall product quality.