TEEIA

熱板/冷板-烘烤設備

華立企業股份有限公司

華立企業成立於1968年高雄,是高科技材料、設備與技術服務的整體解決方案供應商。我們的使命是「引進及發展前瞻材料、設備與技術,提供高加值服務,造福員工、客戶及股東」。 華立企業致力於營造優質的工作環境和企業文化,期待全體同仁共同努力實現企業使命,達成在大中華地區提供高科技材料、設備與技術整體解決方案的願景。

Solution Details

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熱板/冷板-烘烤設備

  1. FOPLP/FOWLP烘烤設備
  2. 對應不同製程所需烘烤設備需求, 脫水乾燥, 軟烤, 硬烤等
  3. 對應基板尺寸規格: 510x515mm, 300x300mm, 600x600mm, 12”Wafer等
  4. 高效溫度控制精度, 常規規格溫度可達到≦150℃:±2.5℃, 最大溫度可客製化達到≦250℃規格
  5. 基板翹取解決方案設計, 避免基板翹曲造成溫度不均問題發生 

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