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Oxford Instruments is a leading provider of high-technology products and services to the world's leading companies and scientific research communities in the compound semiconductors industry.
Advance your semiconductor fabrication and characterisation processes with Oxford Instruments’ full spectrum of solutions. Measure crystal homogeneity, material stress and strain in 3D with Raman imaging microscopy; characterise defects, roughness, elasticity and electronic properties using atomic force microscopy; evaluate structure and elemental composition with the electron microscopy techniques: EDS, EBSD, and the revolutionary BEX (Backscattered Electron and X-Ray); and achieve precise and consistent plasma etch, deposition and interface optimisation of micro- & nano-structures and films, using atomic layer etch, atomic layer deposition, ICP (etch & dep), PECVD and plasma polish techniques, with our plasma technology solutions.