TEEIA

半導體尾氣處理設備

銳澤實業股份有限公司

銳澤為氣體供應設備整合專家,我們以客戶服務為導向,提供高品質、高可靠度與快速反應的特殊氣體管路整合統包工程服務,。在台灣高科技產業發展累積超過10多年深厚實績,為產業發展的重要幫手。


我們整合多領域專業菁英人才,從工程設計到施工安裝、管路測試與維護,透過先進設備和智能數據化管理,確保技術結構的保密性與安全性。


多年來,銳澤傑出的工程品質管理與優質的服務精神,為半導體、電芯、氣體、石化、電信、面板、設備材料/系統等高科技產業提供技術解決方案。高度獲得國際大廠優良的口碑及覆蓋率,建立更深遠的信賴夥伴關係共創雙贏。

 

Solution Details

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125 銳澤實業-解決方案-圖1

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125 銳澤實業-解決方案-圖2

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125 銳澤實業-解決方案-圖3

銳澤實業開發local scrubber,整合主動式噴氣及氣固分離技術,提供高效率去除粉塵之解決方案。


新型主動式噴氣設計是利用將堆積於管道的粉塵往分離器方向吹,氣固分離器利用螺旋氣流將大小顆粒往下帶,乾淨無粉塵的特氣會到後續的燃燒段去除。

此外主動式噴氣的另一好處為高流速的氣流帶動沾附於管壁的粉塵,尾氣管路也不需加熱帶,大幅降低製程中能源消耗,減少管道堵塞延長Dry pump及Burn scrubber尾氣設備使用壽命及妥善率。因此解決管道堵塞能降低設備維修成本並提高晶圓良率及生產效能。

 

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