TEEIA

應用奈米科技

應用奈米科技股份有限公司

應用奈米科技股份有限公司(Applied Nano Technology Science, ANTS)致力於生產真空製程設備之特定部件,以及整合自動化及量測功能之電子設備,藉由自主的研發能量,為客戶提供技術、產品、與後勤服務。ANTS高精度產品,包含接觸角量測儀、磁流體軸封與旋轉陰極靶模組。從設計、製造、組裝到維護,ANTS擁有完整的知識技術後盾,可以根據客戶需求進行客製化服務。

應用奈米科技重視並努力維護與合作夥伴的良好關係,藉由團隊合作一同解決跨領域的複雜問題,追求雙贏的理想成果。

Solution Details

應用奈米科技的高精度產品主要有三項,「磁流體軸封」、「接觸角影像分析儀」與「旋轉靶驅動模組」。

●「磁流體軸封」(Magnetic Feedthrough),是真空設備的核心驅動部件。利用磁性流體,搭配特殊的磁路設計,形成如「液體 O 型環」之密封機構,可以同時兼顧,軸心轉動與腔體密封的需求,特別適合用於高科技產業之真空製程設備。

●「接觸角影像分析儀」(Visual Contact Angle, VCA),是一種穩定且準確的接觸角分析儀器,藉由表面接觸角的量測,可以快速、有效的判斷物體表面狀態。此技術廣泛被應用在晶圓清潔、晶片封裝與晶圓切割等領域。除了半導體產業的應用之外,接觸角影像分析儀的優異量測結果,也成為化學工程、製藥工程和生醫工程領域中強大的工具。

●而我們第三項主力產品「旋轉靶驅動模組」(End Block),在真空環境下磁控濺度製程中,相較於傳統型平面型靶材,更新式的旋轉型靶材呈圓柱型,有著更高利用率與更高鍍膜功率等優點。應用奈米科技的旋轉靶驅動模組,結合真空旋轉氣封、旋轉水封、高壓電路三項核心關鍵技術,濃縮於緊湊的機械設計工藝中。

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