TEEIA

高價值大尺寸全物件的SEM/EDS非破壞檢測

台灣電鏡儀器股份有限公司

台灣電鏡最新的旗艦機種MIS MARS X8 Plus,憑藉「大物件非破壞檢測技術」,可提供15吋大型物件的自動化定位檢測,進行高解析的電子顯微影像與缺陷成份分析。

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傳統電子顯微材料分析高度仰賴樣品前處理(裁切/鍍導電層)使樣品可以在真空環境下以電子束進行檢測,但此一連串的程序,會導致永久性的物件破壞並失去再次進行製程試驗的機會,且因不易多點大量取樣而無法建立物件全貌資訊。
台灣電鏡最新的旗艦機種MIS MARS X8 Plus,憑藉「大物件非破壞檢測技術」,可提供15吋大型物件的自動化定位檢測,進行高解析的電子顯微影像與缺陷成份分析,即使是不良導電性的石英/陶瓷也能免裁切免鍍金。

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