local scrubber
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Rayzher Co., Ltd. has developed a local scrubber that integrates active air jet and gas-solid separation technology to provide a highly efficient dust removal solution.
The accumulated dust in the pipeline can be blown towards the separator using active air jet design.
The gas-solid separator creates a spiral gas flow to carry larger particles downward, while the clean, dust-free process gas moves on to the subsequent combustion stage for removal.
Another advantage of the active air jet design is that the high gas velocity can help dislodge dust adhering to the pipe walls, eliminating the need for heating the exhaust pipeline. This significantly reduces energy consumption during the process, minimizes pipeline blockages, and extends the operation life and reliability of exhaust equipment such as the dry pump and burn scrubber. Therefore, solving pipeline blockage can reduce equipment maintenance costs and improve wafer yield and production efficiency.
