Electrostatic chuck maintenance process
Electrostatic chuck maintenance process
Electrostatic chuck maintenance process
1. Detection and diagnosis
- Use professional equipment to conduct a comprehensive inspection of the electrostatic chuck, including adsorption force test, voltage stability test and structural integrity inspection.
- Conduct detailed diagnosis of the problem, determine the source and extent of the fault, and provide a repair report.
2. Repair and Replacement
- Electrical System Repair: Repair or replace aged electrodes, damaged internal wiring and static control modules.
- Structural parts repair: Replace deformed or damaged structural parts and recalibrate the suction cup positioning accuracy.
- Surface treatment: Clean the surface contaminants of the suction cup and re-coat the surface if necessary to restore the adsorption performance.
3. Performance testing and calibration
- Perform functional tests on the repaired suction cups, including suction force, electrostatic voltage stability and temperature tolerance tests.
- Calibrate suction cup performance to ensure it meets the production line's operating standards and accuracy requirements.
4. Reporting and after-sales support
- Provide detailed inspection reports after repairs, recording fault resolution and performance recovery data.
- Provide usage suggestions and maintenance guidelines to reduce the chance of recurrence of failures.
5. ESC Repair Technology
Level 1: Surface Restoration
Level 2: Re-bonding
Level 3: Plate Replacement
Level 4: Replace Heater Plate
Level 5: Brand New
