TEEIA

高潔淨度化學品供應與分裝系統

朋億股份有限公司

朋億股份有限公司(股票代號:6613)成立於1997年6月,自創立以來即定位公司為『產業製程最佳幫手』。

Solution Details

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高潔淨度化學品供應與分裝系統:


1.化學品分類:

    酸性化學品

    鹼性化學品

    有機溶劑化學品


2.化學系統單元架構:

儲存槽:設於廠務區,化學品暫存用,設有液位計,實時通知值班人員補充化學品

供應設備:設置於廠務區,用於化學品供應/輸送/釋稀/淨化

分配閥箱(VMB):設於無塵室,將化學品分配至多個生產機台

I/O Panel:設於無塵室,做為生產機台與供酸機台通訊接口用

DCP (Main PLC Panel):設於廠務區,做為I/OPanel/供酸機台/SCADA訊號交換用

SCADA (監控系統):設於廠務區,監看各I/OPanel/供酸機台/VMB運轉狀況,並實時發出警報及記錄系統狀態

管路系統:化學品輸送用,依化學品特性材質可分為PFA或SUS或PV

UTILITY:供酸機台所需之Power/N2/CDA/UPW/EXH/Drain..屬之


獲得認證:


  • TS(台灣特種設備製造許可證)
  • Semi S2(國際半導體製造設備的安全衛生及環保標準)
  • GB(中國國家標準)

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