TEEIA

靜電消散工藝改善方案

大永真空設備股份有限公司

大永真空是成立於1968年的真空鍍膜設備製造商,深耕超越半世紀以來持續提供客戶最新最佳的鍍膜解決方案。

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類鑽碳(DLC)擁有高硬度、低摩擦係數、高緻密度、耐磨耗、耐腐蝕性、靜電消散性質等特點,因此廣泛應用於半導體產業鏈。


業界的靜電消散工藝主要以硬陽處理、噴塗鐵氟龍為主。在高溫環境下,硬陽處理的靜電消散層會由於上述原因逐漸不穩定,同時也會降低其耐蝕性與機械強度。


DLC塗層特殊結構賦予它鑽石般的機械強度與可調配表面電阻特性,使得DLC在高溫(<300℃)環境也能維持穩定性,以降低成本、提高良率與與信賴性,展現出DLC之優異性能。

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