Special Optical Inspection System
Overall Schematic
Interference fringe information generated from the optical path differences caused by surface irregularities of the sample is converted into height information to produce a 3D image.
No need for sectioning; the system outputs virtual cross-sectional images based on the different interference fringes of each layer , allowing for multi-layer thickness measurement.
Thickness and Surface Roughness Measurement Using White Light Interference.
A single device is suitable for a variety of sample types, accommodating measurements ranging from nanometers to millimeters. It achieves "high resolution," "large field of view," "non-contact," "short measurement time," and "multi-layer film thickness" measurement.
