Grand Process Technology is the nation’s leading brand in the semiconductor wet processing equipment industry, founded in 1993. We have branches throughout Taiwan from the North, Central and Southern areas. We were listed on the TSE in 2011 and we are very well known in the technology industry for manufacturing metal etching equipment, and 8/12 inch single wafer cleaning equipment.

Grand Process Technology has a very strong development and design team. We possess more than ten manufacturing process patents, collaborating with Japan, Germany and other countries. From designing and development, automatic system customization, assembly, testing and product initialization to after-sales service, we provide rapid response to your needs and elevate our quality control. We are committed to handling all your wet processing manufacturing.

In addition, Grand Process Technology has invested millions in a top of the line clean room laboratory. We invest tremendous resources to specialize in innovative developments. We have always had a firm grasp on foreseeing the trends within our field and this enables us to gain trust and orders from our clients.

With 20 years of experience, Grand Process Technology is a trust worthy partner. We plan to combine high quality with comprehensive technical service and aim to develop clients in different fields. We will continue to expand our brand value to China and the global market, taking Grand Process to a whole new level.

Main products and services

1.Single Wafer Spin Processor( UFO、UFO-A ):With automatic Robot transfer module, flexible parameter setting for process chamber , chemical reclaim, End point detector, double side clean function, suitable for UBM Etch, Si Etch, OX Etch, PR Strip, Wafer Clean…etc.
2.Wet Bench System( VAN、DIO ):for various wafer/substrate sizes, applied for many wet processes such as PR Strip, RCA Clean, Glass Clean, Plating, …etc.
3.Combo System( UFO-C ):Integrated soaking tank and single wafer spin chamber in this system, suitable for Metal Lift Off, Carrier Recycle…etc. 2.5/3D advanced packaging process.

  • Enterprise name


  • Chairman

    Hoton Chang

  • Tel


  • Fax


  • Address

    No.89, Sec. 6, Zhonghua Rd., Xiangshan Dist., Hsinchu City 300104, Taiwan, Hsinchu 300104, Taiwan (R.O.C.)

  • Contact person

    Travis Liang

  • E-mail

  • Website

  • Industry category

    Semiconductor Equipment-Developer ‧ Semiconductor Equipment-Wet Etching ‧ Semiconductor Equipment-Wet Stripping ‧ Semiconductor Equipment-Wet Bench

Product picture